SMU-10 source measure module
The First SMU Optimized for Nanoscale Devices
The source measure unit (SMU-10) is the latest module addition to the MeasureReady™ M81-SSM synchronous source measure system. It is designed to handle samples with exceptionally low source noise and high measurement sensitivity. The SMU-10 offers both DC and AC capabilities and an integrated lock-in, providing a comprehensive suite of measurements.
All-in-one precision tool
The SMU-10 integrates 6 instruments into a unified solution
| Measurement | Measure | Source |
|---|---|---|
| DC current | Down to <100 fA | Up to 100 mA |
| DC voltage | Down to microvolts | Up to 10 V |
| AC current | Sine (up to 100 kHz), triangle (up to 5 kHz), square (up to 5 kHz) | |
| AC voltage | Sine (up to 100 kHz), triangle (up to 5 kHz), square (up to 5 kHz) | |
| Lock-in | Down to nanovolts | N/A |
| Resistance | Milliohms to 100 GΩ | |
Download the SMU-10 datasheet
Three-terminal FET DC transfer curve
SMU-10 characterization of FET spanning 10+ decades of current
Source/measure
When testing multi-terminal devices in a cryogenic probe station, use the M81-SSM with SMU-10 modules to apply voltage or current to the DUT and measure the corresponding current or voltage. The SMU’s topology reduces the number of probe arms by half, significantly minimizing thermal impact. Set compliance limits to protect the DUT from accidental overloads.
Advanced resistance
The M81-SSM’s advanced resistance mode compensates for phase shifts caused by parasitic capacitance, ensuring more accurate resistance measurements. This technique reduces errors significantly, improving measurement accuracy.
Minimize thermal impact by using SMU-10 modules with a probe station. In this example, the orange wire is the source, the light blue wire is the drain, the dark blue wire is the gate, and the black wire is the ground.
Four-wire voltage monitoring
Ideal for high-current devices. The Sense-HI and Sense-LO leads enable 4-wire measurements for built-in device voltage monitoring while sourcing currents.
Synchronized sampling
Patented MeasureSync™ technology ensures perfect timing coordination for AC or DC measurements across multiple SMU-10 modules, eliminating data misalignment errors.
SMU-10 specifications
Specifications are subject to change
Voltage
Ranges: 10 mV, 100 mV, 1 V, 10 V
Measure sensitivity: <3 nV1
Source noise (DC to 10 MHz): <0.2 mV RMS, <1.2 mV p-p (typical)
Current
Ranges: 1 nA, 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA
Measure sensitivity: <1 fA1
DC output resistance: >10 TΩ (typical)
Source noise (DC to 10 MHz): <5 nA RMS, <25 nA p-p (typical)
Overvoltage protection: ±200 VDC
Maximum power: 1 W, 4-quadrant operation
Magnetic field exposure: Operational up to 50 mT DC
Size: 142 mm (5.58 in) W × 38.9 mm (1.53 in) H × 245 mm (9.63 in) L
1 10 s time constant, 24 dB roll-off
Noise
| Range | Source | Measure | |||
| 0.1 Hz to 10 Hz | 1 kHz | 0.1 Hz to 10 Hz | 1 kHz | ||
| Voltage noise (typical) | 10 mV | 250 nV RMS (25 µV p-p) | 30 nV/√Hz | 250 nV RMS (25 µV p-p) | 30 nV/√Hz |
| 100 mV | 300 nV RMS (2.75 µV p-p) | 30 nV/√Hz | 300 nV RMS (2.75 µV p-p) | 30 nV/√Hz | |
| 1 V | 550 nV RMS (1.5 µV p-p) | 30 nV/√Hz | 550 nV RMS (1.5 µV p-p) | 40 nV/√Hz | |
| 10 V | 5 µV RMS (1.25 µV p-p) | 80 nV/√Hz | 5 µV RMS (1.25 µV p-p) | 180 nV/√Hz | |
| Current noise (typical) | 1 nA | 100 fA RMS (500 fA p-p) | 6 fA/√Hz (at 10 Hz) | 15 fA RMS (75 fA p-p) | 6 fA/√Hz (at 10 Hz) |
| 10 nA | 100 fA RMS (500 fA p-p) | 20 fA/√Hz (at 100 Hz) | 45 fA RMS (225 fA p-p) | 20 fA/√H (at 100 Hz) | |
| 100 nA | 300 fA RMS (1.5 pA p-p) | 60 fA/√Hz (at 100 Hz) | 175 fA RMS (875 fA p-p) | 60 fA/√Hz at 100 Hz) | |
| 1 µA | 1 pA RMS (5 pA p-p) | 200 fA/√Hz | 1 pA RMS (5 pA p-p) | 200 fA/√Hz | |
| 10 µA | 5 pA RMS (25 pA p-p) | 1 pA/√Hz | 6 pA RMS (30 pA p-p) | 1 pA/√Hz | |
| 100 µA | 50 pA RMS (250 pA p-p) | 3 pA/√Hz | 60 pA RMS (300 pA p-p) | 2 pA/√Hz | |
| 1 mA | 500 pA RMS (2.5 nA p-p) | 30 pA/√Hz | 550 pA RMS (2.75 nA p-p) | 20 pA/√Hz | |
| 10 mA | 5 nA RMS (25 nA p-p) | 300 pA/√Hz | 5.5 nA RMS (27.5 nA p-p) | 200 pA/√Hz | |
| 100 mA | 50 nA RMS (250 nA p-p) | 3 nA/√Hz | 55 nA RMS (1.375 µA p-p) | 2 nA/√Hz | |
Accuracy
| Range | Source | Measure | |||
| DC2 ± (% rdg + offset) | Lock-in2,3 ± (% rdg + offset) | DC2 ± (% rdg + offset) | Lock-in2,3 ± (% rdg + offset) | ||
| Voltage accuracy | 10 mV | 0.15% + 300 µV | 0.15% + 50 nV | 0.15% + 300 µV | 0.15% + 50 nV |
| 100 mV | 0.1% + 300 µV | 0.1% + 500 nV | 0.1% + 300 µV | 0.1% + 500 nV | |
| 1 V | 0.05% + 600 µV | 0.05% + 5 µV | 0.05% + 600 µV | 0.05% + 5 µV | |
| 10 V | 0.05% + 2 mV | 0.05% + 50 µV | 0.05% + 2 mV | 0.05% + 50 µV | |
| Current accuracy | 1 nA | 0.5% + 300 fA | 0.5% + 5 fA | 0.5% + 300 fA | 0.5% + 5 fA |
| 10 nA | 0.1% + 300 fA | 0.1% + 50 fA | 0.1% + 300 fA | 0.1% + 50 fA | |
| 100 nA | 0.1% + 300 pA | 0.1% + 500 fA | 0.1% + 300 pA | 0.1% + 500 fA | |
| 1 µA | 0.1% + 300 pA | 0.1% + 5 pA | 0.1% + 300 pA | 0.1% + 5 pA | |
| 10 µA | 0.05% + 3 nA | 0.05% + 50 pA | 0.05% + 3 nA | 0.05% + 50 pA | |
| 100 µA | 0.05% + 30 nA | 0.05% + 500 pA | 0.05% + 30 nA | 0.05% + 500 pA | |
| 1 mA | 0.05% + 300 nA | 0.05% + 5 nA | 0.05% + 300 nA | 0.05% + 5 nA | |
| 10 mA | 0.05% + 3 µA | 0.05% + 50 nA | 0.05% + 3 µA | 0.05% + 50 nA | |
| 100 mA | 0.05% + 10 µA | 0.05% + 500 nA | 0.05% + 10 µA | 0.05% + 500 nA | |
2 Total system accuracy, 1 year and ±5 °C from Lake Shore calibration, 24 h and ±1 °C from self-calibration, 95% confidence
3 DC to 1 kHz or 10% of source range bandwidth, whichever is lower
Settable resolution
| Range | Source | |
| Voltage settable resolution | 10 mV | 100 nV |
| 100 mV | 1 µV | |
| 1 V | 10 µV | |
| 10 V | 100 µV | |
| Current settable resolution | 1 nA | 10 fA |
| 10 nA | 100 fA | |
| 100 nA | 1 pA | |
| 1 µA | 10 pA | |
| 10 µA | 100 pA | |
| 100 µA | 1 nA | |
| 1 mA | 10 nA | |
| 10 mA | 100 nA | |
| 100 mA | 1 µA |
Temperature coefficient
| Range | Source2,3 | Measure2,3 | |
| ± (ppm rdg/°C + offset/°C) | ± (% rdg + offset) | ||
| Voltage temperature coefficient | 10 mV | 25 ppm/°C + 5 µV/°C | 25 ppm/°C + 20 µV/°C |
| 100 mV | 5 ppm/°C + 5 µV/°C | 10 ppm/°C + 20 µV/°C | |
| 1 V | 5 ppm/°C + 5 µV/°C | 6 ppm/°C + 20 µV/°C | |
| 10 V | 5 ppm/°C + 5 µV/°C | 6 ppm/°C + 100 µV/°C | |
| Current temperature coefficient | 1 nA | 5 ppm/°C + 2 pA/°C | 5 ppm/°C + 0.5 pA/°C |
| 10 nA | 5 ppm/°C + 2 pA/°C | 5 ppm/°C + 0.5 pA/°C | |
| 100 nA | 5 ppm/°C + 2 pA/°C | 5 ppm/°C + 0.5 pA/°C | |
| 1 µA | 5 ppm/°C + 3 pA/°C | 5 ppm/°C + 1.5 pA/°C | |
| 10 µA | 2 ppm/°C + 10 pA/°C | 5 ppm/°C + 1 pA/°C | |
| 100 µA | 2 ppm/°C + 200 pA/°C | 2 ppm/°C + 1 pA/°C | |
| 1 mA | 2 ppm/°C + 500 pA/°C | 2 ppm/°C + 20 pA/°C | |
| 10 mA | 2 ppm/°C + 10 nA/°C | 2 ppm/°C + 5 nA/°C | |
| 100 mA | 2 ppm/°C + 100 nA/°C | 5 ppm/°C + 10 nA/°C |
Impedance and bandwidth
| Range | Impedance | Bandwidth (typical) | |||
| Output (source) | Input (measure) | Source | Measure | ||
| Voltage (typical) | 10 mV | 0.6 Ω | >100 GΩ (typical, remote sense) | 60 kHz | 60 kHz |
| 100 mV | |||||
| 1 V | |||||
| 10 V | |||||
| Current (typical) | 1 nA | >10 TΩ | 100 kΩ | 100 Hz | 350 Hz |
| 10 nA | >1 TΩ | 10 kΩ | 500 Hz | 1.1 kHz | |
| 100 nA | >100 GΩ | 1 kΩ | 1 kHz | 2 kHz | |
| 1 µA | >10 GΩ | 100 Ω | 4 kHz | 10 kHz | |
| 10 µA | >1 GΩ | 10 Ω | 10 kHz | 25 kHz | |
| 100 µA | >100 MΩ | 1 Ω | 50 kHz | 65 kHz | |
| 1 mA | >10 MΩ | 100 mΩ | 100 kHz | >100 kHz | |
| 10 mA | >1 MΩ | 20 mΩ | 100 kHz | >100 kHz | |
| 100 mA | >100 kΩ | 10 mΩ | 100 kHz | >100 kHz | |