Miniature Transporation Sample Vacuum Chamber for Micro-manipulated Probe Stations
Janis Research Company is pleased to announce that it is offering a patent pending, miniature, transportable sample vacuum chamber capable of maintaining a sample in vacuum during transportation via an atmosphere environment. The vacuum chamber can be used for transferring wafer/substrates under vacuum from a glove box with special environment into a vacuum or cryogenic micro-manipulated probe station (or into a vacuum chamber) and back into the glove box after testing, measurements or preparations. This transportable vacuum chamber protects the wafer/substrates from atmospheric contamination both on loading and unloading.
Unlike a common vacuum load lock the vacuum chamber has the following features and benefits.
- typical sizes of 50 mm diameter and 25 mm thickness
- no gate valves required
- very convenient and easy operation
- low cost
- mounting of the transportable sample mount without increasing base temperature of the cryogenic probe station
Click here to visit our probe station overview web page. Please contact firstname.lastname@example.org for more information.
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